About this industry
A specialty-gas pad handles the fab’s most dangerous inventory in the open air — arsine, diborane, germane, phosphine, and silane in cylinders and cabinets, where a leak has to be caught at ppb levels long before anyone smells it. Prater Technical Partners supplies that layer with the ATi GasSens ambient gas-detection line: the A14/A11 modular system distributes fixed sensors across a whole tool bay back to one receiver rack, the B12 and F12iS/F12-D transmitters cover the specialty-gas handling areas, the D12 watches the gas cabinets, and the D16 PortaSens III adds portable leak surveys with the same H-Series sensors. Prater Technical works with you to spec each one from the gas list, the sensor placement, and the area classification.
Compiled by Prater Technical Partners.